@misc{https://doi.org/10.4121/33df3424-ed9b-49cb-910e-64a6d37aa6b0.v1,
  doi = {10.4121/33df3424-ed9b-49cb-910e-64a6d37aa6b0.v1},
  url = {},
  author = {Li, Jun and Tezsevin, Ilker and Merkx, Marc J. M. and Maas, Joost F. W. and Kessels, Wilhelmus M. M. and Sandoval, Tania E. and Mackus, Adrie},
  keywords = {Random sequential adsorption, Area selective deposition, atomic layer deposition, inhibitor packing},
  title = {Data underlying the publication: Packing of inhibitor molecules during area-selective atomic layer deposition studied using random sequential adsorption simulations},
  publisher = {4TU.ResearchData},
  year = {2023},
  copyright = {CC BY 4.0},
}