@misc{https://doi.org/10.4121/32a6e927-7e75-4cc9-a8f4-df360c3ef2ab.v1,
  doi = {10.4121/32a6e927-7e75-4cc9-a8f4-df360c3ef2ab.v1},
  url = {},
  author = {Buijtendorp, Bruno},
  keywords = {silicon carbide, amorphous, hydrogenated, PECVD, mm-submm, loss, dielectric, superconducting, microstrip, Plasma Enhanced Chemical Vapor Deposition},
  title = {Data  underlying the publication: Hydrogenated Amorphous Silicon Carbide: A Low-Loss Deposited Dielectric for Microwave to Submillimeter-Wave Superconducting Circuits},
  publisher = {4TU.ResearchData},
  year = {2024},
  copyright = {CC0},
}