@misc{https://doi.org/10.4121/15082800.v1,
  doi = {10.4121/15082800.v1},
  url = {https://data.4tu.nl/articles/dataset/Data_underlying_the_article_Finite_element_method_for_3D_optical_modeling_of_liquid_crystal_on_silicon_spatial_light_modulator/15082800/1},
  author = {Chen, Po-Ju},
  keywords = {Liquid Crystal on Silicon, spatial light modulator, LCoS, beam steering, di?ractive optics, nite element method},
  title = {Data underlying the article: Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator},
  publisher = {4TU.ResearchData},
  year = {2021},
  copyright = {CC BY 4.0},
}