@misc{https://doi.org/10.4121/13011239.v1,
  doi = {10.4121/13011239.v1},
  url = {https://data.4tu.nl/articles/dataset/Isotropic_plasma_atomic_layer_etching_of_Al2O3/13011239/1},
  author = {Chittock, Nicholas},
  keywords = {Etch Rate},
  title = {Isotropic plasma atomic layer etching of Al2O3},
  publisher = {4TU.ResearchData},
  year = {2020},
  copyright = {CC0},
}