@misc{https://doi.org/10.4121/0c2e30f4-397a-4f51-8bf9-65167dc545fa.v1,
  doi = {10.4121/0c2e30f4-397a-4f51-8bf9-65167dc545fa.v1},
  url = {},
  author = {Lopez Rodriguez, Bruno},
  keywords = {integrated photonics, high quality, icpcvd, amorphous silicon carbide, silicon dioxide, thermal tuning, thermo-optics, pecvd},
  title = {Data underlying the PhD dissertation: High-performance integrated photonics with amorphous silicon carbide},
  publisher = {4TU.ResearchData},
  year = {2025},
  copyright = {CC BY 4.0},
}