@misc{https://doi.org/10.4121/0bb03d8b-d1ac-49bc-8010-a498a981cf3e.v1,
  doi = {10.4121/0bb03d8b-d1ac-49bc-8010-a498a981cf3e.v1},
  url = {},
  author = {Tezsevin, Ilker and Mass, Joost F. W. and Merkx, Marc J. M. and Lengers, Rik and Kessels, Wilhelmus M. M. and Sandoval, Tania E. and Mackus, Adrie},
  keywords = {Area selective deposition, atomic layer deposition, density functional theory, random sequential adsorption, aniline, small molecule inhibitors},
  title = {Data underlying the publication: Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor},
  publisher = {4TU.ResearchData},
  year = {2023},
  copyright = {CC BY 4.0},
}