@misc{https://doi.org/10.4121/01efed58-9427-478a-8687-50b35daf3d9c.v1, doi = {10.4121/01efed58-9427-478a-8687-50b35daf3d9c.v1}, url = {}, author = {Kievits, Arent J. and Hoogenboom, J. P. (Jacob)}, keywords = {Electron Detection, Instrumentation Development, Scanning Electron Microscopy, Scanning Transmission Electron Microscopy, Volume Electron Microscopy, Artifacts, Sample preparation}, title = {Data supporting the doctoral thesis "Volume electron microscopy with 64 beams and optical transmission detection"}, publisher = {4TU.ResearchData}, year = {2024}, copyright = {CC BY 4.0}, }